Busch Group Companies Announce Joint Presence at Semicon West, San Francisco



The three companies of the Busch Group (Busch Vacuum Solutions, Pfeiffer Vacuum and centrotherm clean solutions) announce their joint presence at Semicon West 2024. This marks a significant milestone, as it will be the inaugural occasion that the Busch Group exhibits collectively in one booth in the US.

The Busch Group booth will showcase a range of gas abatement systems, vacuum pumps, contamination management, leak detection, valves, sub-fab management, and service for all brands.

With its integrated turbomolecular vacuum pump, the ASM 392 from Pfeiffer Vacuum is SEMI S2 compliant and optimized for rapid pump downs and short response times on large test objects. Its dry, frictionless backing pump and a powerful high vacuum pump make it ideal for testing in clean room environments.

Series E electric valves: Being unveiled at the show for the first time, Pfeiffer Vacuum’s Series E is a groundbreaking electric angle valve line designed for easy integration into high vacuum applications. Combining advanced electric actuation with energy efficiency, Series E offers superior control, reliability, and cost savings.

ATH 2804 M turbopump: With a compact footprint, Pfeiffer Vacuum’s ATH 2804 M magnetically levitated turbomolecular vacuum pumps provide high gas throughput and are ideal for semiconductor manufacturing processes.

Magnetically levitated turbopumps from Pfeiffer Vacuum

HiPace 3400 IT turbopump: The HiPace 3400 IT, designed exclusively for demanding ion implantation applications, sets the standard as the most compact turbopump in its class. The DN 320 flange size increases the pumping speed for process gases by up to an impressive 30%. Its unique bearing concept and specially coated rotor design protect both the process and the pump, providing unparalleled durability and reliability.

TORRI BD 0100/0600 dry pumps: TORRI BD from Busch Vacuum Solutions offer short pump down times for load lock chambers and are among the smallest, lightest and most energy-efficient dry multi-stage rotary lobe vacuum pumps on the market.

CT-TW-H thermal abatement: The high-temperature thermal abatement system from centrotherm clean solutions combines the wide process coverage of flame abatement with the fuel-free aspects of plasma abatement, with lower operating costs and secondary emissions. Able to destroy the molecular process gas NF3 at class-leading levels with extremely low NOx emissions, the CT-TW-H finally delivers a sustainable solution with a minimal carbon footprint to the CVD and metal-etch process family.

Trade show visitors can speak to experts from Busch Vacuum Solutions, Pfeiffer Vacuum and centrotherm clean solutions at Semicon West from July 9-11, 2024, in booth 733 in the south hall of the Moscone Center, San Francisco.